Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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10/13/2009
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Application #:
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11383912
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Filing Dt:
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05/17/2006
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Publication #:
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Pub Dt:
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11/22/2007
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Inventors:
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Tzung Chi Fu, Shu-Ping Hsu, H.Y. Chang
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Title:
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APPARATUS AND METHOD FOR PARTICLE MONITORING IN IMMERSION LITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 8, LI-HSIN RD. 6 |
| SCIENCE-BASED INDUSTRIAL PARK |
| HSIN-CHU, TAIWAN 300-77 |
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| DAVID M. O'DELL |
| HAYNES AND BOONE, LLP |
| 901 MAIN STREET, SUITE 3100 |
| DALLAS, TX 75202 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 8, LIN-HSIN RD. 6 |
| SCIENCE-BASED INDUSTRIAL PARK |
| HSIN-CHU, TAIWAN 300-77 |
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| DAVID M. O'DELL |
| HAYNES AND BOONE, LLP - IP SECTION |
| 2323 VICTORY AVENUE, SUITE 700 |
| DALLAS, TX 75219 |
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