Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/22/2009
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Application #:
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11384834
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Filing Dt:
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03/21/2006
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Publication #:
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Pub Dt:
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09/27/2007
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Inventors:
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Renatus Gerardus Klaver, Erik Roelof Loopstra et al
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Title:
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DISPLACEMENT MEASUREMENT SYSTEMS LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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DE RUN 6501 |
VELDHOVEN, NETHERLANDS NL-5504 DR |
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PILLSBURY WINTHROP SHAW, ET AL. |
P.O. BOX 10500 |
1650 TYSONS BOULEVARD |
MCLEAN, VA 22102 |
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