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Patent Assignment Abstract of Title

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Total Assignments: 2

Patent #:	7649636	Issue Dt:	01/19/2010	Application #:	11641122	Filing Dt:	12/19/2006
Publication #:	20070153275	Pub Dt:	07/05/2007
Inventors:	Nicolaas Petrus Van Der Aa, Arie Jeffrey Den Boef, Henricus Gerhardus Ter Morsche et al
Title:	OPTICAL METROLOGY SYSTEM AND METROLOGY MARK CHARACTERIZATION DEVICE

Assignment: 1

Reel/Frame:

018901/0033

Recorded: 02/09/2007

Pages: 6

Conveyance:

ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignors:

VAN DER AA, NICOLAAS PETRUS

Exec Dt:

01/16/2007

BOEF, ARIE JEFFREY DEN

Exec Dt:

02/07/2007

MATTHEIJ, ROBERT MARTINUS MARIA

Exec Dt:

01/10/2007

MORSCHE, HENRICUS GERHARDUS TER

Exec Dt:

01/09/2007

Assignee:

ASML NETHERLANDS B.V.

DE RUN 6501, NL-5504 DR

VELDHOVEN, NETHERLANDS

Correspondent:

PILLSBURY WINTHROP SHAW PITTMAN LLP

P.O. BOX 10500

1650 TYSONS BOULEVARD

MCLEAN, VA 22102

Assignment: 2

Reel/Frame:

022033/0430

Recorded: 12/29/2008

Pages: 8

Conveyance:

CORRECTIVE ASSIGNMENT TO CORRECT THE NAMES OF BOEF, ARIE JEFFREY DEN AND MORSCHE, HENRICUS GERHARDUS TER PREVIOUSLY RECORDED ON REEL 018901 FRAME 0033. ASSIGNOR(S) HEREBY CONFIRMS THE CORRECT NAMES ARE ARIE JEFFREY DEN BOEF AND HENRICUS GERHARDUS TER MORSCHE.

Assignors:

VAN DER AA, NICOLAAS PETRUS

Exec Dt:

01/16/2007