Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/31/2010
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Application #:
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10676295
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Filing Dt:
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09/30/2003
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Publication #:
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Pub Dt:
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07/01/2004
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Inventors:
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Andrea Urban, Franz Laermer, Klaus Breitschwerdt, Volker Becker
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Title:
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METHOD OF ETCHING STRUCTURES INTO AN ETCHING BODY USING A PLASMA
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| POSTFACH 30 02 20 |
| D-70442 STUTTGART, GERMANY |
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| KENYON & KENYON |
| RICHARD L. MAYER |
| ONE BROADWAY |
| NEW YORK, NY 10004 |
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