Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/05/2010
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Application #:
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12165792
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Filing Dt:
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07/01/2008
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Publication #:
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Pub Dt:
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07/16/2009
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Inventors:
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CHUN-HUNG HUANG, MING-LANG CHANG, YEN-CHIA PENG, TSANG-FANG JENG, TZU-HSIN KUO
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Title:
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PROTECTION GAS CONTROL METHOD FOR NON-SEALED PROCESS CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 195, SEC. 4, CHUNG-HSING RD.CHU-TUNG |
| HSINCHU, TAIWAN |
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| WPAT, PC |
| 1940 DUKE ST., SUITE 200 |
| ALEXANDRIA, VA 22314 |
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