Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/08/2011
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Application #:
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12405710
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Filing Dt:
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03/17/2009
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Publication #:
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Pub Dt:
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10/01/2009
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Inventors:
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Masafumi Asano, Kenji Yoshida, Masahiro Kanno
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Title:
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METHOD FOR EVALUATING LITHOGRAPHY APPARATUS AND METHOD FOR CONTROLLING LITHOGRAPHY APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-1, SHIBAURA 1-CHOME, MINATO-KU |
| TOKYO, JAPAN 105-8001 |
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| FINNEGAN |
| 901 NEW YORK AVENUE NW |
| WASHINGTON DC, DC 20001 |
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