Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/19/2011
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Application #:
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12411507
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Filing Dt:
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03/26/2009
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Publication #:
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Pub Dt:
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10/01/2009
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Inventors:
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Minoru Imaeda, Yuichiro Imanishi, Takao Saito
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Title:
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APPARATUS FOR DEPOSITING SILICON-BASED THIN FILM AND METHOD FOR DEPOSITING SILICON-BASED THIN FILM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-56, SUDA-CHO, MIZUHO-KU |
| NAGOYA-CITY, AICHI, JAPAN 467-8530 |
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| BURR & BROWN |
| PO BOX 7068 |
| SYRACUSE, NY 13261-7068 |
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