Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/24/2011
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Application #:
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11836957
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Filing Dt:
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08/10/2007
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Publication #:
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Pub Dt:
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02/12/2009
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Inventor:
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Yannick FEURPRIER
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Title:
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METHOD FOR ETCHING LOW-K MATERIAL USING AN OXIDE HARD MASK
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| TPS BROADCAST CENTER, 3-6 AKASAKA 5-CHOME |
| MINATO-KU, TOKYO, JAPAN 107-8481 |
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| ERIC STRANG |
| 4350 W CHANDLER BLVD., SUITE 10 |
| CHANDLER, AZ 85226 |
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