Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/24/2011
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Application #:
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11848154
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Filing Dt:
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08/30/2007
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Publication #:
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Pub Dt:
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03/05/2009
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Inventors:
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WEI LIU, SHIFANG LI, WEIDONG YANG
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Title:
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DETERMINING PROFILE PARAMETERS OF A STRUCTURE USING APPROXIMATION AND FINE DIFFRACTION MODELS IN OPTICAL METROLOGY
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3-6 AKASAKA 5-CHOME |
MINATO-KU TOKYO, JAPAN 107-8481 |
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MANUEL BARROGA MADRIAGA |
2953 BUNKER HILL LANE SUITE 301 |
SANTA CLARA, CA 95054 |
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