Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/09/2011
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Application #:
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11525878
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Filing Dt:
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09/23/2006
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Publication #:
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Pub Dt:
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03/27/2008
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Inventors:
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Jonathan England, Scott Holden, Julian Blake, Steven R. Walther, Reuel Liebert et al
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Title:
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TECHNIQUES FOR TEMPERATURE CONTROLLED ION IMPLANTATION
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Assignment:
1
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| 35 DORY ROAD |
| GLOUCESTER, MASSACHUSETTS 01930 |
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| SCOTT RICHARD FABER, ESQ. |
| 35 DORY ROAD |
| VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATE |
| GLOUCESTER, MA 01930 |
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