Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/23/2011
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Application #:
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12367741
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Filing Dt:
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02/09/2009
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Publication #:
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Pub Dt:
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08/13/2009
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Inventors:
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Craig R. Chaney, Adolph R. Dori, Christopher R. Hatem, Alexander S. Perel
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Title:
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ETHANE IMPLANTATION WITH A DILUTION GAS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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35 DORY ROAD |
GLOUCESTER, MASSACHUSETTS 01930 |
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SCOTT R. FABER |
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATE |
35 DORY ROAD |
GLOUCESTER, MA 01930 |
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