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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
08/23/2011
Application #:
12492894
Filing Dt:
06/26/2009
Publication #:
Pub Dt:
12/30/2010
Inventors:
Wilhelm P. Platow, Neil J. Bassom, Peter F. Kurunczi, Alexander S. Perel et al
Title:
ION SOURCE CLEANING END POINT DETECTION
Assignment: 1
Reel/Frame:
023122/0878Recorded: 08/20/2009Pages: 7
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
07/13/2009
Exec Dt:
07/13/2009
Exec Dt:
07/13/2009
Exec Dt:
07/13/2009
Exec Dt:
07/13/2009
Assignee:
35 DORY ROAD
GLOUCESTER, MASSACHUSETTS 01930
Correspondent:
VARIAN SEMICONDUCTOR EQUIPMENT ASSC., IN
35 DORY RD.
GLOUCESTER, MA 01930-2297

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