Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/30/2011
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Application #:
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12032112
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Filing Dt:
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02/15/2008
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Publication #:
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Pub Dt:
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08/28/2008
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Inventors:
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Kurt Lehman, Charles Chen, Ronald L. Allen, Robert Shinagawa, Anantha Sethuraman et al
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Title:
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METHODS AND SYSTEMS FOR MONITORING A PARAMETER OF A MEASUREMENT DEVICE DURING POLISHING, DAMAGE TO A SPECIMEN DURING POLISHING, OR A CHARACTERISTIC OF A POLISHING PAD OR TOOL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ONE TECHNOLOGY DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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| BAKER & MCKENZIE LLP |
| 1114 AVENUE OF THE AMERICAS |
| NEW YORK, NY 10036 |
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