Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/11/2011
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Application #:
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12333239
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Filing Dt:
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12/11/2008
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Inventors:
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Christopher Gage, Charles E. Pomeroy, Nagarajan Kalyanasundaram, David Cohen
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Title:
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MINIMUM CONTACT AREA WAFER CLAMPING WITH GAS FLOW FOR RAPID WAFER COOLING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3970 NORTH FIRST STREET |
SAN JOSE, CALIFORNIA 95134 |
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WEAVER AUSTIN VILLENEUVE & SAMPSON LLP |
PO BOX 70250 |
OAKLAND, CA 94612-0250 |
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