Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/11/2011
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Application #:
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11390196
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Filing Dt:
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03/28/2006
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Publication #:
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Pub Dt:
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10/11/2007
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Inventors:
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Yuji Tsukamoto, Thomas Hamelin, H. Steven Tomozawa, Sam Yong Kim
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Title:
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GAS DISTRIBUTION SYSTEM FOR A POST-ETCH TREATMENT SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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TBS BROADCAST CENTER, 3-6, AKASAKA 5-CHOME, MINATO-KU |
TOKYO 107-8481, JAPAN |
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C. IRVIN MCCLELLAND |
OBLON, SPIVAK, MCCLELLAND, MAIER & NEUSTADT |
1940 DUKE STREET |
ALEXANDRIA, VA 22314 |
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