Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/01/2011
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Application #:
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10531469
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Filing Dt:
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04/15/2005
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Publication #:
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Pub Dt:
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03/09/2006
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Inventors:
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Hongyu Yue, Hieu A Lam
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Title:
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METHOD AND APPARATUS FOR DETERMINING AN ETCH PROPERTY USING AN ENDPOINT SIGNAL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| TBS BROADCAST CENTER, 3-6 AKASAKA 5-CHOME |
| MINATO-KU, TOKYO 107-8481, JAPAN |
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| OBLON, SPIVAK, MCCLELLAND, MAIER & NEUST |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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