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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
01/03/2012
Application #:
12323783
Filing Dt:
11/26/2008
Publication #:
Pub Dt:
06/04/2009
Inventors:
Do-Haing Lee, Ha-Na Kim, Yong-Jin Kim
Title:
APPARATUS AND METHOD FOR PROCESSING SUBSTRATE USING NEUTRALIZED BEAMS INCLUDING APPLYING A VOLTAGE TO A SUBSTRATE SUPPORT
Assignment: 1
Reel/Frame:
021895/0354Recorded: 11/26/2008Pages: 6
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
11/06/2008
Exec Dt:
11/06/2008
Exec Dt:
11/06/2008
Assignee:
416 MAETAN-DONG
YEONGTONG-GU, SUWON-SI
GYEONGGI-DO, KOREA, DEMOCRATIC PEOPLE'S REPUBLIC OF
Correspondent:
MYERS BIGEL
4140 PARKLAKE AVE. SUITE 600
RALEIGH, NC 27612

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