Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/17/2012
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Application #:
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12682000
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Filing Dt:
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07/08/2010
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Publication #:
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Pub Dt:
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10/21/2010
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Inventors:
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Robertus T. F. Van Schaijk, Piebe Anne Zijlstra, Ronald Koster, Pieter Simon Van Dijk
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Title:
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MANUFACTURING A MEMS ELEMENT HAVING CANTILEVER AND CAVITY ON A SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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ST.-MARTIN-STRASSE 53 |
MUNICH, GERMANY 81669 |
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JUSTIN D. SWINDELLS |
NIXON PEABODY LLP |
300 S. RIVERSIDE PLAZA, 16TH FLOOR |
CHICAGO, IL 60606 |
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