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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
8110493
Issue Dt:
02/07/2012
Application #:
12048967
Filing Dt:
03/14/2008
Inventors:
Pramod Subramonium, Zhiyuan Fang, Jon Henri
Title:
PULSED PECVD METHOD FOR MODULATING HYDROGEN CONTENT IN HARD MASK
Assignment: 1
Reel/Frame:
020991/0178Recorded: 05/23/2008Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
SUBRAMONIUM, PRAMOD
Exec Dt:
05/20/2008
FANG, ZHIYUAN
Exec Dt:
05/20/2008
HENRI, JON
Exec Dt:
05/20/2008
Assignee:
NOVELLUS SYSTEMS, INC.
3970 NORTH FIRST STREET
SAN JOSE, CALIFORNIA 95134
Correspondent:
WEAVER AUSTIN VILLENEUVE & SAMPSON LLP
500 12TH STREET, SUITE 200
OAKLAND, CA 94607
Assignment: 2
Reel/Frame:
021142/0951Recorded: 06/24/2008Pages: 6
Conveyance:
CORRECTIVE ASSIGNMENT TO CORRECT THE WORD HYDORGEN IN THE TITLE TO HYDROGEN PREVIOUSLY RECORDED ON REEL 020991 FRAME 0178. ASSIGNOR(S) HEREBY CONFIRMS THE WORD HYDORGEN IN THE TITLE BE CORRECTED TO HYDROGEN.
Assignors:
SUBRAMONIUM, PRAMOD
Exec Dt:
05/20/2008
FANG, ZHIYUAN
Exec Dt:
05/20/2008
HENRI, JON
Exec Dt:
05/20/2008
Assignee:
NOVELLUS SYSTEMS, INC.
3970 NORTH FIRST STREET
SAN JOSE, CALIFORNIA 95134
Correspondent:
WEAVER AUSTIN VILLENEUVE & SAMPSON LLP
500 12TH STREET
OAKLAND, CA 94607

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