Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/15/2012
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Application #:
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11730197
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Filing Dt:
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03/29/2007
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Publication #:
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Pub Dt:
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12/13/2007
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Inventors:
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Ryou Mochizuki, Jun Yashiro
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Title:
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ETCHING METHOD, PLASMA PROCESSING SYSTEM AND STORAGE MEDIUM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 5-CHOME MINATO-KU |
| TOKYO-TO, JAPAN |
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| SMITH, GAMBRELL & RUSSELL |
| 1850 M STREET, N.W., SUITE 800 |
| WASHINGTON, D.C. 20036 |
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