Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/29/2012
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Application #:
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11490936
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Filing Dt:
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07/21/2006
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Publication #:
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Pub Dt:
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10/25/2007
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Inventors:
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Jong Mun Kim, Jingbao Liu, Bryan Y. Pu
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Title:
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PLASMA ETCH REACTOR WITH DISTRIBUTION OF ETCH GASES ACROSS A WAFER SURFACE AND A POLYMER OXIDIZING GAS IN AN INDEPENDENTLY FED CENTER GAS ZONE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| APPLIED MATERIALS, INC. |
| P.O. BOX 450A |
| PATENT COUNSEL |
| SANTA CLARA, CA 95052 |
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