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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
06/12/2012
Application #:
12106881
Filing Dt:
04/21/2008
Publication #:
Pub Dt:
01/15/2009
Inventors:
Ashish Shah, Dale R. DuBois, Ganesh Balasubramanian, Mark A. Fodor, Eui Kyoon Kim et al
Title:
SYSTEMS FOR PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION AND BEVEL EDGE ETCHING
Assignment: 1
Reel/Frame:
020925/0545Recorded: 05/09/2008Pages: 11
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
05/01/2008
Exec Dt:
05/01/2008
Exec Dt:
04/30/2008
Exec Dt:
04/30/2008
Exec Dt:
04/28/2008
Exec Dt:
05/01/2008
Exec Dt:
05/01/2008
Exec Dt:
05/05/2008
Exec Dt:
04/29/2008
Exec Dt:
05/01/2008
Exec Dt:
05/01/2008
Exec Dt:
05/01/2008
Exec Dt:
04/29/2008
Assignee:
P. O. BOX 450A
SANTA CLARA, CALIFORNIA 95052
Correspondent:
APPLIED MATERIALS
P.O. BOX 450A
SANTA CLARA, CA 95052

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