Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/21/2012
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Application #:
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11948801
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Filing Dt:
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11/30/2007
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Publication #:
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Pub Dt:
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07/10/2008
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Inventors:
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Everhardus Cornelis Mos, Maurits Van Der Schaar, Hubertus Johannes Simons
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Title:
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LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD AND DEVICE FOR CORRECTING OVERLAY ERRORS BETWEEN OVERLAPPING PATTERNS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DERUN 6501 |
| VELDHOVEN, NETHERLANDS NL-5504 DR |
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| PILLSBURY WINTHROP SHAW, ET AL. |
| P.O. BOX 10500 |
| 1650 TYSONS BOULEVARD |
| MCLEAN, VA 22102 |
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