Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/25/2012
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Application #:
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12465173
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Filing Dt:
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05/13/2009
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Publication #:
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Pub Dt:
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11/19/2009
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Inventors:
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Kazuaki Kozasa, Tomonori Kawasaki
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Title:
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ETCHING METHOD AND ETCHING APPARATUS OF SEMICONDUCTOR WAFER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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1324-2, MASURAGAHARA-MACHI |
OMURA-SHI, NAGASAKI 856-8555, JAPAN |
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ALSTON & BIRD LLP |
BANK OF AMERICA PLAZA |
101 SOUTH TRYON STREET, SUITE 4000 |
CHARLOTTE, NC 28280-4000 |
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