Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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10/09/2012
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Application #:
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12496748
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Filing Dt:
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07/02/2009
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Publication #:
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Pub Dt:
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12/03/2009
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Inventors:
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Dirk Marteen Knotter, Arnoldus Den Dekker, Robertus T. F. Van Schaijk, Ronald Koster
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Title:
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ETCHING WITH IMPROVED CONTROL OF CRITICAL FEATURE DIMENSIONS AT THE BOTTOM OF THICK LAYERS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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ST.-MARTIN-STRASSE 53 |
MUNICH, GERMANY 81669 |
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SLATER & MATSIL, L.L.P. |
17950 PRESTON ROAD |
SUITE 1000 |
DALLAS, TX 75252 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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ST.-MARTIN-STRASSE 53 |
MUENCHEN, GERMANY 81669 |
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SLATER & MATSIL, L.L.P. |
17950 PRESTON RD. |
SUITE 1000 |
DALLAS, TX 75252 |
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