Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/11/2012
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Application #:
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13030438
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Filing Dt:
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02/18/2011
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Publication #:
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Pub Dt:
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08/23/2012
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Inventors:
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Atsuki Fukazawa, Noboru Takamure
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Title:
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METHOD OF DEPOSITING DIELECTRIC FILM BY ALD USING PRECURSOR CONTAINING SILICON, HYDROCARBON, AND HALOGEN
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 23-1, 6-CHOME, NAGAYAMA |
| TAMA-SHI, TOKYO, JAPAN 206-0025 |
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| SNELL & WILMER L.L.P. / DAMON L. BOYD |
| ONE ARIZONA CENTER |
| 400 EAST VAN BUREN STREET |
| PHOENIX, AZ 85004-2202 |
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