Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/18/2012
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Application #:
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13053215
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Filing Dt:
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03/22/2011
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Publication #:
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Pub Dt:
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09/27/2012
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Inventors:
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Vinh Hoang LUONG, Akiteru KO
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Title:
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ETCH PROCESS FOR CONTROLLING PATTERN CD AND INTEGRITY IN MULTI-LAYER MASKS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME |
| MINATO-KU, TOKYO, JAPAN 107-6325 |
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| TOKYO ELECTRON U.S. HOLDINGS, INC. |
| 2545 W. FRYE RD. |
| SUITE 1 |
| CHANDLER, AZ 85224 |
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