Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/22/2013
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Application #:
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12898615
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Filing Dt:
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10/05/2010
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Publication #:
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Pub Dt:
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04/05/2012
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Inventors:
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Daniel K. Berkoh, Elena B. Woodard, Dean G. Scott
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Title:
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APPARATUS AND METHODS FOR ELECTRICAL MEASUREMENTS IN A PLASMA ETCHER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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20 SYLVAN ROAD |
WOBURN, MASSACHUSETTS 01801 |
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SKYWORKS SOLUTIONS, INC. |
5221 CALIFORNIA AVENUE |
MS 21-1 |
IRVINE, CA 92617 |
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