Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/19/2013
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Application #:
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13006608
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Filing Dt:
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01/14/2011
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Publication #:
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Pub Dt:
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05/31/2012
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Inventors:
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Burn Jeng LIN, Tsai-Sheng GAU, Ru-Gun LIU, Wen-Chun Huang
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Title:
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METHOD FOR METAL CORRELATED VIA SPLIT FOR DOUBLE PATTERNING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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NO. 8, LI-HSIN RD. VI, HSINCHU SCIENCE PARK |
HSINCHU, TAIWAN 300 |
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LOWE HAUPTMAN HAM & BERNER, LLP |
1700 DIAGONAL ROAD |
SUITE 300 |
ALEXANDRIA, VA 22314 |
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