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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
02/26/2013
Application #:
10519724
Filing Dt:
12/28/2004
Publication #:
Pub Dt:
01/12/2006
Inventor:
Franz Laermer
Title:
DEVICE AND METHOD FOR PRODUCING CHLORINE TRIFLUORIDE AND SYSTEM FOR ETCHING SEMICONDUCTOR SUBSTRATES USING THIS DEVICE
Assignment: 1
Reel/Frame:
017011/0149Recorded: 12/28/2004Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
10/20/2004
Assignee:
POSTFACH 30 02 20
D-70442 STUTTGART, GERMANY
Correspondent:
KENYON & KENYON LLP
ONE BROADWAY
NEW YORK, NY 10004

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