Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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05/07/2013
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Application #:
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12723496
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Filing Dt:
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03/12/2010
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Publication #:
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Pub Dt:
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08/12/2010
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Inventors:
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Helmut Beierl, Heiko Feldmann, Jochen Hetzler, Michael Totzeck
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Title:
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PROJECTION OBJECTIVE FOR MICROLITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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RUDOLF-EBER-STRASSE 2 |
OBERKOCHEN, GERMANY 73447 |
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SEAN P. DALEY |
FISH & RICHARDSON P.C. |
P.O. BOX 1022 |
MINNEAPOLIS, MN 55440-1022 |
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Assignment:
2
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RUDOLF-EBER-STRASSE 2 |
73447 OBERKOCHEN, GERMANY |
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TIMOTHY A. FRENCH |
FISH & RICHARDSON P.C. |
ONE MARINA PARK DRIVE |
BOSTON, MASSACHUSETTS 02210-1878 |
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