Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/04/2013
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Application #:
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12535324
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Filing Dt:
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08/04/2009
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Publication #:
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Pub Dt:
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11/26/2009
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Inventors:
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Roy G. Gordon, Booyong S. Lim
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Title:
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ATOMIC LAYER DEPOSITION USING METAL AMIDINATES
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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17 QUINCY STREET |
CAMBRIDGE, MASSACHUSETTS 02138 |
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WILMERHALE/BOSTON |
60 STATE STREET |
BOSTON, MA 02109 |
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