Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/04/2013
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Application #:
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12720960
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Filing Dt:
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03/10/2010
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Publication #:
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Pub Dt:
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09/15/2011
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Inventors:
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Craig R. CHANEY, Alexander S. Perel, Neil J. Bassom, Leo V. Klos
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Title:
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CLEANING OF AN EXTRACTION APERTURE OF AN ION SOURCE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 35 DORY ROAD |
| GLOUCESTER, MASSACHUSETTS 01930 |
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| VARIAN SEMICONDUCTOR EQUIPMENT ASSC., IN |
| 35 DORY RD. |
| GLOUCESTER, MA 01930-2297 |
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