Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/08/2013
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Application #:
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12367754
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Filing Dt:
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02/09/2009
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Publication #:
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Pub Dt:
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08/13/2009
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Inventors:
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James E. Tappan, Scott Jeffery Stevenot
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Title:
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ADJUSTABLE GAP CAPACITIVELY COUPLED RF PLASMA REACTOR INCLUDING LATERAL BELLOWS AND NON-CONTACT PARTICLE SEAL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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4650 CUSHING PARKWAY |
FREMONT, CALIFORNIA 94538 |
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BUCHANAN, INGERSOLL & ROONEY PC |
POST OFFICE BOX 1404 |
ALEXANDRIA, VA 22313-1404 |
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