Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/19/2013
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Application #:
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12161657
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Filing Dt:
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03/12/2010
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Publication #:
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Pub Dt:
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09/16/2010
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Inventors:
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Mino Green, Feng-Ming Liu
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Title:
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METHOD OF ETCHING A SILICON-BASED MATERIAL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 9400 GARSINGTON ROAD |
| OXFORD BUSINESS PARK |
| OXFORD OX4 2HN, UNITED KINGDOM |
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| FAY SHARPE LLP |
| 1228 EUCLID AVENUE, 5TH FLOOR |
| THE HALLE BUILDING |
| CLEVELAND, OH 44115 |
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