Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/26/2013
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Application #:
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13181910
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Filing Dt:
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07/13/2011
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Publication #:
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Pub Dt:
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11/03/2011
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Inventors:
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John J. Hautala, Nathan E. Baxter
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Title:
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METHOD FOR MODIFYING A MATERIAL LAYER USING GAS CLUSTER ION BEAM PROCESSING
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Assignment:
1
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MERGER (SEE DOCUMENT FOR DETAILS).
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3455 LYMAN BLVD. |
CHASKA, MINNESOTA 55318 |
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TOKYO ELECTRON U.S. HOLDINGS, INC. |
2400 GROVE BLVD |
AUSTIN, TX 78741 |
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