Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/03/2013
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Application #:
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13295915
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Filing Dt:
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11/14/2011
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Publication #:
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Pub Dt:
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05/31/2012
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Inventors:
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Yuri Erokhin, Louis Steen, Hans-Joachim Ludwig Gossman
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Title:
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DOPING OF PLANAR OR THREE-DIMENSIONAL STRUCTURES AT ELEVATED TEMPERATURES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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35 DORY ROAD |
GLOUCESTER, MASSACHUSETTS 01930 |
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SCOTT R. FABER, REG. NO. 48380 |
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATE |
35 DORY ROAD |
GLOUCESTER, MA 01930 |
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