Patent Assignment Abstract of Title
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
Total Assignments:
1
|
Patent #:
|
|
Issue Dt:
|
12/10/2013
|
Application #:
|
12645638
|
Filing Dt:
|
12/23/2009
|
Publication #:
|
|
Pub Dt:
|
10/07/2010
| | | | |
Inventors:
|
Ludovic Godet, Timothy Miller, George Papasouliotis, Vikram Singh
|
Title:
|
Enhanced Etch and Deposition Profile Control Using Plasma Sheath Engineering
|
|
Assignment:
1
|
|
|
|
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
|
|
|
|
|
|
35 DORY ROAD |
GLOUCESTER, MASSACHUSETTS 01930 |
|
|
|
SCOTT R. FABER |
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATE |
35 DORY ROAD |
GLOUCESTER, MA 01930 |
|
|
Search Results as of:
09/24/2024 02:04 PM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|