Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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04/01/2014
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Application #:
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13548489
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Filing Dt:
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07/13/2012
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Publication #:
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Pub Dt:
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11/01/2012
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Inventors:
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Jeffrey M. Lauerhaas, Jimmy D. Collins, Tracy A. Gast, Alan D. Rosa
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Title:
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TOOLS AND METHODS FOR PROCESSING MICROELECTRONIC WORKPIECES USING PROCESS CHAMBER DESIGNS THAT EASILY TRANSITION BETWEEN OPEN AND CLOSED MODES OF OPERATION
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Assignment:
1
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| 3455 LYMAN BOULEVARD |
| CHASKA, MINNESOTA 55318 |
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| MELODY HILLMAN |
| 2545 W. FRYE ROAD, SUITE 1 |
| CHANDLER, AZ 85224 |
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Assignment:
2
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| 3455 LYMAN BLVD. |
| CHASKA, MINNESOTA 55318 |
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| TOKYO ELECTRON U.S. HOLDINGS, INC. |
| 2400 GROVE BLVD. |
| AUSTIN, TX 78741 |
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