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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
07/22/2014
Application #:
12761038
Filing Dt:
04/15/2010
Publication #:
Pub Dt:
11/18/2010
Inventors:
Christophe DE METSENAERE, Ronald Casper Kunst, Paul Petrus Joannes Berkvens et al
Title:
IMMERSION LITHOGRAPHIC APPARATUS INCLUDING A PRESSURE SENSOR TO MEASURE PRESSURE OF THE IMMERSION LIQUID AND A DEVICE MANUFACTURING METHOD
Assignment: 1
Reel/Frame:
024612/0550Recorded: 06/29/2010Pages: 8
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
06/16/2010
Exec Dt:
06/09/2010
Exec Dt:
06/09/2010
Exec Dt:
06/23/2010
Exec Dt:
06/09/2010
Exec Dt:
06/09/2010
Assignee:
DE RUN 6501
VELDHOVEN, NETHERLANDS NL-5504 DR
Correspondent:
CHRISTOPHE F. LAIR
1650 TYSONS BOULEVARD, SUITE 1400
MCLEAN, VA 22102

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