Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/05/2014
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Application #:
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13031112
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Filing Dt:
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02/18/2011
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Publication #:
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Pub Dt:
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08/25/2011
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Inventors:
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Mark H. SOMERVELL, Benjamen M. Rathsack, Ian J. Brown, Steven Scheer, Joshua Hooge
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Title:
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LINE PATTERN COLLAPSE MITIGATION THROUGH GAP-FILL MATERIAL APPLICATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| ANDREJ MITROVIC |
| 4350 W CHANDLER BLVD |
| TOKYO ELECTRON US HOLDINGS |
| CHANDLER, AZ 85226 |
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