Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/19/2014
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Application #:
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12353634
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Filing Dt:
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01/14/2009
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Publication #:
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Pub Dt:
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07/15/2010
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Inventor:
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Kelvin Kyaw Zin
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Title:
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Method of etching a thin film using pressure modulation
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME |
| MINATO-KU, TOKYO, JAPAN 107-6325 |
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| TOKYO ELECTRON U.S. HOLDINGS, INC. |
| 4350 W. CHANDLER BLVD. |
| SUITE 10 |
| CHANDLER, AZ 85226 |
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