Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/30/2014
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Application #:
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13208823
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Filing Dt:
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08/12/2011
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Publication #:
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Pub Dt:
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02/23/2012
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Inventors:
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Johannes LIPPERT, Dirk SCHAFFER
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Title:
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OPTICAL ELEMENT FOR UV OR EUV LITHOGRAPHY WITH COATINGS HAVING OPTIMIZED STRESS AND THICKNESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| RUDOLF-EBER-STRASSE 2 |
| OBERKOCHEN, GERMANY 73447 |
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| GEORGE F. LEHNIGK |
| 9801 WASHINGTONIAN BLVD. |
| SUITE 750 |
| GAITHERSBURG, MD 20878 |
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