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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
8853653
Issue Dt:
10/07/2014
Application #:
14037207
Filing Dt:
09/25/2013
Inventors:
George M. Gammel, Norman E. Hussey, Shengwu Chang, David Roger Timberlake et al
Title:
APPARATUS AND TECHNIQUES FOR CONTROLLING ION IMPLANTATION UNIFORMITY
Assignment: 1
Reel/Frame:
031311/0860Recorded: 09/30/2013Pages: 9
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
TODOROV, STANISLAV S.
Exec Dt:
09/30/2013
GAMMEL, GEORGE M.
Exec Dt:
09/27/2013
SPRENKLE, RICHARD ALLEN
Exec Dt:
09/30/2013
HUSSEY, NORMAN E.
Exec Dt:
09/30/2013
SINCLAIR, FRANK
Exec Dt:
09/30/2013
CHANG, SHENGWU
Exec Dt:
09/30/2013
OLSON, JOSEPH C.
Exec Dt:
09/30/2013
TIMBERLAKE, DAVID ROGER
Exec Dt:
09/30/2013
DECKER-LUCKE, KURT T.
Exec Dt:
09/30/2013
Assignee:
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD
GLOUCESTER, MASSACHUSETTS 01930
Correspondent:
DANIEL N. DAISAK
3120 PRINCETON PIKE, SUITE 303
KACVINSKY DAISAK PLLC
LAWRENCEVILLE, NJ 08648

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