Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/11/2014
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Application #:
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13088299
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Filing Dt:
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04/15/2011
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Publication #:
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Pub Dt:
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11/17/2011
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Inventors:
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Wolfgang Singer, Yim-Bun-Patrick Kwan, Stefan-Wolfgang Schmidt, Dirk Heinrich Ehm et al
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Title:
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EUV LITHOGRAPHY DEVICE AND METHOD FOR PROCESSING AN OPTICAL ELEMENT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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RUDOLF-EBER-STRASSE 2 |
OBERKOCHEN, GERMANY 73447 |
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GEORGE F. LEHNIGK |
2100 PENNSYLVANIA AVE NW |
SUITE 800 |
WASHINGTON, DC 20035 |
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