Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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03/03/2015
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Application #:
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13436458
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Filing Dt:
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03/30/2012
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Publication #:
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Pub Dt:
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10/03/2013
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Inventors:
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Lee Chen, Demetre J. Economou, Radha Sundararajan, Jianping Zhao, Vincent M. Donnelly et al
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Title:
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LOW ELECTRON TEMPERATURE MICROWAVE SURFACE-WAVE PLASMA (SWP) PROCESSING METHOD AND APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| AKASAKA BIZ TOWER |
| 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| WOOD, HERRON & EVANS, LLP |
| 441 VINE STREET |
| SUITE 2700 |
| CINCINNATI, OH 45202 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 316 E. CULLEN BUILDING |
| HOUSTON, TEXAS 77204-2015 |
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| WOOD, HERRON & EVANS, LLP |
| 441 VINE STREET |
| SUITE 2700 |
| CINCINNATI, OH 45202 |
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