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Patent Assignment Abstract of Title

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Total Assignments: 1

Patent #:	9017571	Issue Dt:	04/28/2015	Application #:	13808506	Filing Dt:	01/04/2013
Publication #:	20130105728	Pub Dt:	05/02/2013
Inventors:	Tomonori Umezaki, Yasuo Hibino, Isamu Mori, Satoru Okamoto, Akiou Kikuchi
Title:	Dry Etching Agent and Dry Etching Method

Assignment: 1

Reel/Frame:

Recorded: 01/30/2013

Pages: 10

Conveyance:

ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignors:

Exec Dt:

11/12/2012

Exec Dt:

11/02/2012

Exec Dt:

11/22/2012

Exec Dt:

11/02/2012

Exec Dt:

11/22/2012

Assignee:

5253, OAZA OKIUBE

UBE-SHI, YAMAGUCHI, JAPAN 755-0001

Correspondent:

CROWELL & MORING LLP

1001 PENNSYLVANIA AVENUE, N.W.

WASHINGTON, DC 20004

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