Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/28/2015
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Application #:
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13955009
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Filing Dt:
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07/31/2013
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Publication #:
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Pub Dt:
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11/28/2013
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Inventors:
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Bon-Woong Koo, Victor Benveniste, Christopher A. Rowland, Craig R. Chaney et al
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Title:
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EXCITED GAS INJECTION FOR ION IMPLANT CONTROL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 35 DORY ROAD |
| GLOUCESTER, MASSACHUSETTS 01930 |
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| SCOTT R. FABER |
| 35 DORY ROAD |
| GLOUCESTER, MA 01930 |
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