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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
9087176
Issue Dt:
07/21/2015
Application #:
14220665
Filing Dt:
03/20/2014
Inventors:
Wei Chang, Krishna Rao, Joseph Gutierrez, Ramon Olavarria, Craig Macnaughton et al
Title:
STATISTICAL OVERLAY ERROR PREDICTION FOR FEED FORWARD AND FEEDBACK CORRECTION OF OVERLAY ERRORS, ROOT CAUSE ANALYSIS AND PROCESS CONTROL
Assignment: 1
Reel/Frame:
032853/0166Recorded: 05/08/2014Pages: 11
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
CHANG, WEI
Exec Dt:
03/26/2014
RAO, KRISHNA
Exec Dt:
03/26/2014
GUTIERREZ, JOSEPH
Exec Dt:
03/26/2014
OLAVARRIA, RAMON
Exec Dt:
03/26/2014
MACNAUGHTON, CRAIG
Exec Dt:
03/31/2014
AZORDEGAN, AMIR
Exec Dt:
03/27/2014
DIGHE, PRASANNA
Exec Dt:
03/31/2014
Assignee:
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE
MILPITAS, CALIFORNIA 95035
Correspondent:
SUITER SWANTZ/KLA JOINT CUSTOMER NUMBER
14301 FNB PARKWAY
SUITE 220
OMAHA, NE 68154-5299
Assignment: 2
Reel/Frame:
035576/0565Recorded: 05/06/2015Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
SINHA, JAYDEEP
Exec Dt:
05/05/2015
Assignee:
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE
MILPITAS, CALIFORNIA 95035
Correspondent:
SUITER SWANTZ/KLA JOINT CUSTOMER NUMBER
14301 FNB PARKWAY
SUITE 220
OMAHA, NE 68154-5299

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