Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/11/2015
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Application #:
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14316769
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Filing Dt:
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06/26/2014
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Inventors:
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Yu-Hsiang Chiu, Jeng-Ho Wang, Hsin-Yi Lu, Chang-Sheng Hsu
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Title:
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ETCHING METHOD FOR MANUFACTURING MEMS DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 3, LI-HSIN RD. II, |
| SCIENCE-BASED INDUSTRIAL PARK, |
| HSINCHU, TAIWAN |
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| DING YU TAN |
| 20806 FIGURINE COURT |
| KATY, TX 77450 |
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